| Title | Single shot laser damage in ultraviolet mirrors with a stepwise reflectivity profile |
|---|---|
| Publication Type | Articolo su Rivista peer-reviewed |
| Year of Publication | 2000 |
| Authors | Diso, D., Perrone M.R., Piegari A., Protopapa Maria Lucia, and Scaglione S. |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 18 |
| Pagination | 477-484 |
| ISSN | 07342101 |
| Keywords | Coatings, Excimer lasers, Laser damage, Laser pulses, Microscopic examination, Mirrors, Photoacoustic beam deflection techniques, Photoacoustic spectroscopy, Photothermal beam deflection techniques, Reflection, Stepwise reflectivity profile, Thin films, Ultraviolet mirrors |
| Abstract | Photoacoustic (PA) and photothermal (PT) beam deflection techniques were used to measure the laser damage threshold of a mirror with a stepwise reflectivity profile designed for KrF excimer lasers (248 nm). It was found that the presence of a sharp step in the coating thickness and thus in the mirror reflectivity, do not introduce a critical area for damage. |
| Notes | cited By 5 |
| URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0034156307&doi=10.1116%2f1.582212&partnerID=40&md5=e3e9dc12af17df562538b63f049dfe7f |
| DOI | 10.1116/1.582212 |
| Citation Key | Diso2000477 |
