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Structural and optical properties of zinc selenide thin films deposited by RF magnetron sputtering

TitleStructural and optical properties of zinc selenide thin films deposited by RF magnetron sputtering
Publication TypePresentazione a Congresso
Year of Publication1999
AuthorsRizzo, Antonella, Caneve L., Scaglione S., and Tagliente M.A.
Conference NameProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers, Bellingham, WA, United States
Conference LocationBerlin, Ger
KeywordsArgon, Fourier transform infrared spectroscopy, Magnetron sputtering, Optical coatings, Optical films, Residual stresses, silicon, Strain, Substrates, Textures, Thin films, X ray crystallography, Zinc compounds, Zinc selenide
Abstract

In this work, ZnSe thin films were deposited by radio frequency magnetron sputtering onto (100) oriented silicon substrates. Three sets of samples were produced by varying the argon working gas pressure (0.4, 0.5, 0.9 Pa), and changing the sputtering power supply (25÷150 W). The effect of the different growth conditions on the structural and optical properties of the ZnSe films was investigated by using XRD and FTIR Spectroscopy. In particular, X-ray diffraction was used in order to study the residual strains and texture. The ZnSe coatings were grown in the cubic polymorph with the grains preferentially oriented for all the investigated pressures with the exception of 0.5 Pa. An in-plane residual stress reversal, which changed from compressive to tensile by going from the low to the high-pressure samples set, was observed. At the 0.5 Pa pressure, the ZnSe coatings were both in compressive and tensile state, according to the power supply value. These results have been correlated with the momentum of reflected neutral in order to find an exhaustive description of the deposition process. At low momentum values, the ZnSe films show tensile state, low refractive index (2.27 at 10.6μm), grains preferentially oriented, while at high momentum they were in compressive state, refractive index very alike to the bulk and grains randomly oriented.

URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-0032642762&partnerID=40&md5=923b905eb0bdc5e6f963053b30a7ae5b
Citation KeyRizzo199940