We report on accurate structural investigations of sputtered Nb/Pd multilayers by means of high-resolution secondary ion mass spectrometry and x-ray reflectivity. The combined use of secondary ion mass spectrometry and x-ray specular reflectivity techniques allows us to study the chemical configuration of the interfaces and to relate it to the observed superconducting properties. Secondary ion mass spectrometry analyses reveal a distinct Nb and Pd modulation and very sharp profiles with abrupt interfaces indicating a negligible interdiffusion of Nb and Pd at the interfaces. Moreover, analyzing the features in the Nb and Pd profiles and correlating them to the oxygen distribution in the multilayers and to the low-angle x-ray patterns, thin layers (3-4 nm thick) of niobium oxide were noticed at the Nb/Pd interfaces, while no oxide layers at the Pd/Nb interfaces could be detected. The role of this oxide layer in the determination of the crossover between three- and two-dimensional superconducting behavior in parallel external magnetic field, is discussed. © 2000 American Institute of Physics.

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