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Structural and chemical investigation of surface and interface of multilayer optical coatings deposited by DIBS

TitleStructural and chemical investigation of surface and interface of multilayer optical coatings deposited by DIBS
Publication TypeArticolo su Rivista peer-reviewed
Year of Publication2000
AuthorsAlvisi, Marco, Mirenghi L., Tapfer Leander, Rizzo Antonella, Ferrara Maria Cristina, Scaglione S., and Vasanelli L.
JournalApplied Surface Science
Volume157
Pagination52-60
ISSN01694332
KeywordsAtomic force microscopy, Image analysis, Interfaces (materials), Nondestructive examination, Optical coatings, Optical devices, Optical multilayers, Surface roughness, X ray photoelectron spectroscopy, X-ray reflectivity
Abstract

The investigation of the surface and interface of a multilayer coating is a key factor for producing high quality optical device. In this work, we present a non-destructive technique as X-ray reflectivity to study deeply the chemical and structural quality of the multilayer. XPS depth profile analysis and AFM images have been used to evaluate the chemical intermixing and the surface roughness in order to verify the X-ray results.

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cited By 4

URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-0033882464&doi=10.1016%2fS0169-4332%2899%2900520-6&partnerID=40&md5=bf23f3b0fd1aefcb6c5073afca59515c
DOI10.1016/S0169-4332(99)00520-6
Citation KeyAlvisi200052