Multiple spot mirrors are non-conventional optical components which present a number of equally spaced circular spots with a high reflectance that decreases to zero outside the spots. It is believed that the use of multiple spot mirrors as full reflectors in plane-parallel laser cavities should allow to improve the laser beam optical quality and get a good filling of the active medium. A double-spot mirror and a four-spot mirror for a XeCl laser cavity (λ=308 nm) have been fabricated by depositing HfO2 and SiO2 thin films by reactive ion beam sputtering. The design employed allows to obtain a maximum reflectance (79%) on the spot area and a reflectance lower than 0.5% outside the spots by shaping the thickness of one of the inner layer. To this aim, a properly shaped mask was put inside the vacuum chamber during the deposition of the graded layer. The realization and the optical characterization of these devices are presented in this paper.